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https://ah.lib.nccu.edu.tw/handle/140.119/10256
題名: | A Genetic Algorithms Approach to Manage Ion Implantation Processes in Wafer Fabrication | 作者: | 洪叔民;J.W. Fowler;L.K. Cochran | 日期: | Apr-2000 | 上傳時間: | 25-Nov-2008 | 關聯: | International Journal of Manufacturing Technology and Management, 1(2/3), 156-172 | 資料類型: | article |
Appears in Collections: | 期刊論文 |
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