A Group-Technology Coded Literature Review of Semiconductor Manufacturing Publications: The MASMLAB Bibliography Web Site

Abstract

Modeling and simulation of semiconductor manufacturing operations is a rapidly developing area with a supporting published literature that is exploding in size. In this paper, we present a study of that literature which we use to build a searchable database that is implemented as an Internet site (http://www.eas.asu.edu/masmlab/Biblio.html). The semiconductor manufacturing modeling community needs a focused, electronically accessible, and better structured bibliographic resource. To accomplish this, we have developed a database that uses a group technology coding of articles based upon index searching. The importance of this database is not only in collecting many pertinent articles for users, but also in classifying them. The objectives of this site are to be useful to industrial practitioners, faculty members, students, and software developers, and to be widely available, economically feasible, and easily managed. The user can search the database by problem type, measurement metric, modeling technique, organization decision level, publication year, and publication type to find desirable article lists within a short time. The Modeling and Analysis of Semiconductor Manufacturing Laboratory (MASMLAB) database currently contains 559 coded articles relevant to the modeling and analysis of semiconductor manufacturing