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題名 IC基板製程時間之特徵選擇研究-以鑽孔作業為例
A Study of Features Selection to Process Time of IC Substrate - For Example of Drilling Operation
作者 宋伯謙
Soong, Elias
貢獻者 劉文卿<br>許志堅
宋伯謙
Elias Soong
關鍵詞 特徵選擇
產品特徵
製程時間
資料挖礦
Features Selection
Product Characteristics
Process Time
Data-mining
日期 2017
上傳時間 8-二月-2017 16:34:37 (UTC+8)
摘要 在數據分析的領域中,尤其在大數據的領域之中,因常含有相當高維度的預測變數,故特徵選擇是一個很重要的主題。這個主題在半導體的應用上,已經獲得相當豐碩的成果,但在IC基板的應用上,成果就相對顯得貧乏。所以,此次的研究(以IC基板中鑽孔製程為例)將透過以下的試驗方法(含:GR-SNBC (Gain Ratio with Naive Bayes Classifier)、SU-SNBC (Symmetrical Uncer-tainty with Naive Bayes Classifier)與SU-CART (Symmetrical Uncer-tainty with Classification and Regression Tree Classifier)),來建立可應用於IC基板製程時間預測上的一組屬性。最後,此一研究的成果不僅在於,使用資料挖礦的方法,來找出一組具有顯著性,而且可以用來預測的IC基板製程時間的產品特徵屬性;而且,發現若為了縮短製程時間,來自產品結構本身的因子,會比來自產品在生產管理上的因子更具顯著的效果。
Feature selection is significate subject in domain of data analysis, especially in big-data with a lot of high dimension predictive variables. In semi-conductor field, this subject has already gotten a plenty of achievement, but not in IC-substrate; so in this research for example of drilling operation, through experiments, it builds a group of se-lective features for this field to predict process time, and the methods used are GR-SNBC (Gain Ratio with Naive Bayes Classifier), SU-SNBC (Symmetrical Uncertainty with Naive Bayes Classifier) and SU-CART (Symmetrical Uncertainty with Classification and Regression Tree Classifier). The contributions of this research are not only a selective product characteristics subset suggested to predict process-time in IC-substrate fab via the data-mining methods here, but also an observation that in order to shorten the process time, the factors of product construction weighs more than production management.
參考文獻 [1] Backus, P.; Janakiram, M.; Mowzoon, S.; Runger, G.C.; Bhargava, A. "Factory cycle-time prediction with a data-mining ap-proach", Semiconductor Manufacturing, IEEE Transactions on, On page(s): 252 - 258 Volume: 19, Issue: 2, May 2006
[2] I. Tirkel, "Cycle time prediction in wafer fabrication line by ap-plying data mining methods", Proc. 22nd IEEE/SEMIASMC, pp. 1-5, 2011
[3] Y. Meidan , B. Lerner , G. Rabinowitz and M. Hassoun, "Cycle-time key factor identification and prediction in semiconductor manufacturing using machine learning and data mining", IEEE Trans. Semicond. Manuf., vol. 24, no. 2, pp. 237-248, 2011
[4] Chien, C. F., Hsiao, C. W., Meng, C., Hong, K. D., Wang, S. T., 2005. Cycle time prediction and control based on production line status and manufacturing data mining, Proceedings of Inter-national Symposium on Semiconductor Manufacturing Con-ference 2005, 13-15 September, San Jose, California, USA, pp.327-330.
[5] Hassoun, M. "On Improving the Predictability of Cycle Time in an NVM Fab by Correct Segmentation of the Pro-cess", Semiconductor Manufacturing, IEEE Transactions on, On page(s): 613 - 618 Volume: 26, Issue: 4, Nov. 2013
[6] Dash, M., & Liu, H. (1997). Feature selection for classifica-tion. Intelligent Data Analysis, 1(1-4), 131-156.
[7] Liu, H., & Motoda, H. (1998). Feature extraction, construction and selection: A data mining perspective. Norwell,MA: Kluwer Academic Publishers.
[8] Liu, H., & Motoda, H. (1998). Feature selection for knowledge discovery and data mining. Norwell, MA: Kluwer Academic Publishers.
[9] A. Whitney, "A direct method of nonparametric measurement selection", IEEE Transactions on Computers, vol. 20, pp.1100-1103, 1971
[10] S.-H. Chung and H.-W. Huang, "Cycle time estimation for wafer fab with engineering lots", IIE Trans., vol. 34, pp. 105-118, 2002
描述 碩士
國立政治大學
資訊管理學系
103356043
資料來源 http://thesis.lib.nccu.edu.tw/record/#G0103356043
資料類型 thesis
dc.contributor.advisor 劉文卿<br>許志堅zh_TW
dc.contributor.author (作者) 宋伯謙zh_TW
dc.contributor.author (作者) Elias Soongen_US
dc.creator (作者) 宋伯謙zh_TW
dc.creator (作者) Soong, Eliasen_US
dc.date (日期) 2017en_US
dc.date.accessioned 8-二月-2017 16:34:37 (UTC+8)-
dc.date.available 8-二月-2017 16:34:37 (UTC+8)-
dc.date.issued (上傳時間) 8-二月-2017 16:34:37 (UTC+8)-
dc.identifier (其他 識別碼) G0103356043en_US
dc.identifier.uri (URI) http://nccur.lib.nccu.edu.tw/handle/140.119/106396-
dc.description (描述) 碩士zh_TW
dc.description (描述) 國立政治大學zh_TW
dc.description (描述) 資訊管理學系zh_TW
dc.description (描述) 103356043zh_TW
dc.description.abstract (摘要) 在數據分析的領域中,尤其在大數據的領域之中,因常含有相當高維度的預測變數,故特徵選擇是一個很重要的主題。這個主題在半導體的應用上,已經獲得相當豐碩的成果,但在IC基板的應用上,成果就相對顯得貧乏。所以,此次的研究(以IC基板中鑽孔製程為例)將透過以下的試驗方法(含:GR-SNBC (Gain Ratio with Naive Bayes Classifier)、SU-SNBC (Symmetrical Uncer-tainty with Naive Bayes Classifier)與SU-CART (Symmetrical Uncer-tainty with Classification and Regression Tree Classifier)),來建立可應用於IC基板製程時間預測上的一組屬性。最後,此一研究的成果不僅在於,使用資料挖礦的方法,來找出一組具有顯著性,而且可以用來預測的IC基板製程時間的產品特徵屬性;而且,發現若為了縮短製程時間,來自產品結構本身的因子,會比來自產品在生產管理上的因子更具顯著的效果。zh_TW
dc.description.abstract (摘要) Feature selection is significate subject in domain of data analysis, especially in big-data with a lot of high dimension predictive variables. In semi-conductor field, this subject has already gotten a plenty of achievement, but not in IC-substrate; so in this research for example of drilling operation, through experiments, it builds a group of se-lective features for this field to predict process time, and the methods used are GR-SNBC (Gain Ratio with Naive Bayes Classifier), SU-SNBC (Symmetrical Uncertainty with Naive Bayes Classifier) and SU-CART (Symmetrical Uncertainty with Classification and Regression Tree Classifier). The contributions of this research are not only a selective product characteristics subset suggested to predict process-time in IC-substrate fab via the data-mining methods here, but also an observation that in order to shorten the process time, the factors of product construction weighs more than production management.en_US
dc.description.tableofcontents 中文摘要 i
ABSTRACT ii
Table of Contents iii
Table of Figures v
Table of Tables vi
1 Introduction 1
2 Literature Review 3
2.1 Predictive Factors about Cycle Time 3
2.2 Related Work about Time Predicted 4
2.3 Data Mining and Knowledge Discovery in Databases 6
3 Methods Design 11
3.1 Data Preparation 11
3.1.1 Data Collection and Review 11
3.1.2 Data Integration 12
3.2 Data Pre-processing 14
3.2.1 Data Filtering 14
3.2.2 Data Cleaning 15
3.2.3 Data Transformation 17
3.2.4 Data Reduction 17
3.3 Data-Mining Method 18
4 Empirical Implement 25
4.1 Experimental Data Settlement 25
4.2 Experimental Approaches Implement 29
4.3 Experimental Result and Discussion 34
4.3.1 Experimental Result of Filters 34
4.3.2 Experimental Result of Wrappers with Filtering 36
4.3.3 Experimental Result of Analysis 40
5 Conclusion 43
5.1 Study Limitations 43
5.2 Research Contribution 43
5.3 Future Suggestion 44
REFERENCE 45
zh_TW
dc.format.extent 3662681 bytes-
dc.format.mimetype application/pdf-
dc.source.uri (資料來源) http://thesis.lib.nccu.edu.tw/record/#G0103356043en_US
dc.subject (關鍵詞) 特徵選擇zh_TW
dc.subject (關鍵詞) 產品特徵zh_TW
dc.subject (關鍵詞) 製程時間zh_TW
dc.subject (關鍵詞) 資料挖礦zh_TW
dc.subject (關鍵詞) Features Selectionen_US
dc.subject (關鍵詞) Product Characteristicsen_US
dc.subject (關鍵詞) Process Timeen_US
dc.subject (關鍵詞) Data-miningen_US
dc.title (題名) IC基板製程時間之特徵選擇研究-以鑽孔作業為例zh_TW
dc.title (題名) A Study of Features Selection to Process Time of IC Substrate - For Example of Drilling Operationen_US
dc.type (資料類型) thesisen_US
dc.relation.reference (參考文獻) [1] Backus, P.; Janakiram, M.; Mowzoon, S.; Runger, G.C.; Bhargava, A. "Factory cycle-time prediction with a data-mining ap-proach", Semiconductor Manufacturing, IEEE Transactions on, On page(s): 252 - 258 Volume: 19, Issue: 2, May 2006
[2] I. Tirkel, "Cycle time prediction in wafer fabrication line by ap-plying data mining methods", Proc. 22nd IEEE/SEMIASMC, pp. 1-5, 2011
[3] Y. Meidan , B. Lerner , G. Rabinowitz and M. Hassoun, "Cycle-time key factor identification and prediction in semiconductor manufacturing using machine learning and data mining", IEEE Trans. Semicond. Manuf., vol. 24, no. 2, pp. 237-248, 2011
[4] Chien, C. F., Hsiao, C. W., Meng, C., Hong, K. D., Wang, S. T., 2005. Cycle time prediction and control based on production line status and manufacturing data mining, Proceedings of Inter-national Symposium on Semiconductor Manufacturing Con-ference 2005, 13-15 September, San Jose, California, USA, pp.327-330.
[5] Hassoun, M. "On Improving the Predictability of Cycle Time in an NVM Fab by Correct Segmentation of the Pro-cess", Semiconductor Manufacturing, IEEE Transactions on, On page(s): 613 - 618 Volume: 26, Issue: 4, Nov. 2013
[6] Dash, M., & Liu, H. (1997). Feature selection for classifica-tion. Intelligent Data Analysis, 1(1-4), 131-156.
[7] Liu, H., & Motoda, H. (1998). Feature extraction, construction and selection: A data mining perspective. Norwell,MA: Kluwer Academic Publishers.
[8] Liu, H., & Motoda, H. (1998). Feature selection for knowledge discovery and data mining. Norwell, MA: Kluwer Academic Publishers.
[9] A. Whitney, "A direct method of nonparametric measurement selection", IEEE Transactions on Computers, vol. 20, pp.1100-1103, 1971
[10] S.-H. Chung and H.-W. Huang, "Cycle time estimation for wafer fab with engineering lots", IIE Trans., vol. 34, pp. 105-118, 2002
zh_TW