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題名 利用半導體製程及射頻濺鍍製備128對碲化鉍-碲化銻薄膜熱電元件
Fabrication of 128 Pairs Bi-Sb-Te Based Thin Film Thermoelectric Generator by Lithography and RF Sputtering Deposition作者 范文軒
Fan, Wen-Hsuan貢獻者 陳洋元
Chen, Yang-Yuan
范文軒
Fan, Wen-Hsuan關鍵詞 薄膜
熱電元件
射頻
半導體製程
Sputtering
Lithography日期 2018 上傳時間 29-八月-2018 15:55:44 (UTC+8) 摘要 因應全世界能源問題，本論文研究重點在於收集生活中所有可能的廢熱來轉換成電能。並利用轉換能量的想法製作元件應用於目前市面上低功率電子產品。本論文之熱電元件大小尺寸長寬高分別為35mm x 35mm x 1mm並利用有400nm氧化層的矽基板作為基板，元件圖形運用黃光半導體製程建構128對的微陣列，藉由射頻濺鍍的方式製備N型(〖Cu〗_0.02 Bi_2 Te_2.7 Se_0.3)及P型(〖Bi〗_0.5 Sb_1.5 Te_3+0.33%Aerogel)的熱電材料且厚度達到10 μm。最後利用金作為上電極使128對的P型材料及N型材料串聯。本論文最大的突破是相較一般市售元件在熱傳導上降低將近一個數量級。並且期待在接近10K的溫差下能夠產生足以驅動電子元件功率。若能妥善利用該元件對於環境溫度變化極為敏銳且瞬間輸出電壓極大的優點，對於現代社會將是一大福音。本論文的熱電元件最津津樂道的是它代表著乾淨且永續的能源供應，熱電轉換的想法也可能是解決未來能源危機上的解決之道。
In response to the rising concern of global energy shortage, this thesis focus on how to transfer the waste heat from our daily life to electric power. We use this idea to create a device that can convert the energy to fit the need of most electrical devices which demand lower power in market. The diameter of thermoelectric device is 35 mm x 35 mm x1 mm in our work. We use silicon with 400 nm oxide layer as substrate. The pattern of 128 pairs of micro array thermoelectric device is constructed by semiconductor process. The N-type (〖Cu〗_0.02 Bi_2 Te_2.7 Se_0.3) and P-type(〖Bi〗_0.5 Sb_1.5 Te_3+0.33%Aerogel) film with thickness of 10 μm deposited by Radio Frequency Sputtering was prepared and the Au film was deposited as electrodes to make 128 pairs of P-N array. The breakthrough in this thesis is to reduce thermal conductance of the device one order less than that of commercial ones. This device is expected to output enough power to drive electronic devices as the temperature gradient near 10 K. If we can completely use the advantage of our device which is sensitive to environment temperature and give an electrical voltage output, then the idea will give society a valuable benefit. Thermoelectric device has tremendous potential of commercial value. The most value of this thesis is that thermoelectric device can present clean green energy, it may offer a solution to solve the global warming and energy shortage.參考文獻 [1] Wenhua Zhang (2016), A high power density micro-thermoelectric generator fabricated by an integrated bottom-up approach, journal of microelectromechanical system, vol. 25, no. 4, p.744-749 [2] Leonov V. Thermoelectric energy harvester on the heated human machine. J Micro Micro 2011;21:1–8. [3] Yancheng Wang,2018,Wearable thermoelectric generator to harvest body heat for powering a miniaturized accelerometer,Applied Energy,p.690-698 [4] Funahashi S, Nakamura T, Kageyama K, Ieki H. Monolithic oxide–metal composite thermoelectric generators for energy harvesting. J Appl Phys 2011;109:1–4. [5] Z.Xiao, 2018, The fabrication of nanoscale Bi2Te3/Sb2Te3 multilayer thin film-based thermoelectric power chips ,microelectronic engineering ,volume 197, pages 8-14 [6] Mizue Mizoshir , Yoshitaka Ito ,2017,Fabrication of thin-film thermoelectric generators with ball lenses for conversion of near-infrared solar light, The Japan Society of Applied Physics, 06GN06 [7] ShuangLiu, 2018,Micro-thermoelectric generators based on through glass pillars with high output voltage enabled by large temperature difference, Applied Energy Volume 225,Pages 600-610 [8]經濟部能源局，能源新政策，上網日期107年05月17日，檢自：https://www.moeaboe.gov.tw/ECW/populace/content/ContentDesc.aspx?menu_id=3165 [9] H.B. Gao ,2016,Development of stove-powered thermoelectric generators: A review ,Applied Thermal Engineering,96 297–310 [10] Hi-Z, Manufacturer of thermoelectric modules, 2015. Available from: www.hi- z.com. [11] Tellurex, Manufacturer of thermoelectric modules, 2015. Available from: www.tellurex.com. [12] Tecteg, Manufacturer of thermoelectric modules, 2015. Available from: www.tecteg.com. [13] Thermalforce, Manufacturer of thermoelectric modules, 2015. Available from: www.thermalforce.de. [14] Thermodynamic, Manufacturer of thermoelectric modules, 2015. Available from: www.thermonamic.com. [15] wireless-sensor, Retrieved: Sep. 2013 ,from:http://www.analog.com/media/cn/technical-documentation/technical-articles/Electronics_Application_201309_(LTC3109).pdf [16] 醫療監控，EETT-Taiwan，上網日期107年05月17日，檢自：https://www.eettaiwan.com/news/article/20171023NT01-Garment-Pattern-Power-Biosensor-Nets [17] Watch , http://www.coretechnology.com.tw/files/%E6%99%BA%E6%85%A7%E5%9E%8B%E6%89%8B%E9%8C%B6%E5%8A%9F%E8%80%97%E5%88%86%E6%9E%90%E5%85%A8%E8%A8%98%E9%8C%84.pdf [18]Seebeck, Retrieved June 8 2018, from: https://en.wikipedia.org/wiki/Thermoelectric_effect [19]Peltier, Retrieved 18 October 2013, from: https://en.wikipedia.org/wiki/Peltier [20]Thomson, Retrieved June 8 2018, from: https://en.wikipedia.org/wiki/Thermoelectric_effect#Thomson_effect [21]Neil W.Ashcroft，(1976)。Solid State Physics。Holt, Rinehart and Winston。 [22]Neil W.Ashcroft，(1976)。Solid State Physics。Holt, Rinehart and Winston。 [23]Seebeck Coefficient, Samuel B.Schaevitz, (2000).A MEMS thermoelectric generator, Publisher Location: Department of electrical engineering and computer science, pp.43 [24]Thermoelectric, Retrieved none,from: http://thermoelectrics.matsci.northwestern.edu/thermoelectrics/index.html [25]thermoelectric, Retrieve 2015, from: https://www.researchgate.net/profile/Corson_Cramer/publication/271137303/figure/fig6/AS:392142578044937@1470505484606/Curve-of-the-thermal-efficiency-of-a-thermoelectric-generator-as-a-function-of-the.ppm [26], Retrieved 20 Mar. 2014, from: http://cmnst.ncku.edu.tw/files/15-1023-159877,c17606-1.php?Lang=zh-tw [27] SPS, Retrieved 17 Oct. 2016, from: https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.201300409 [28] RF sputter, Retrieved 15 May 2013, from: http://www.kobelcokaken.co.jp/target/chinese/index.html [29] ZiyangWang,2009, Realization of a wearable miniaturized thermoelectric generator for human body applications Sensors and Actuators A: Physical Volume 156, Issue 1,Pages 95-102 描述 碩士
國立政治大學
應用物理研究所
1057550041資料來源 http://thesis.lib.nccu.edu.tw/record/#G1057550041 資料類型 thesis dc.contributor.advisor 陳洋元 zh_TW dc.contributor.advisor Chen, Yang-Yuan en_US dc.contributor.author (作者) 范文軒 zh_TW dc.contributor.author (作者) Fan, Wen-Hsuan en_US dc.creator (作者) 范文軒 zh_TW dc.creator (作者) Fan, Wen-Hsuan en_US dc.date (日期) 2018 en_US dc.date.accessioned 29-八月-2018 15:55:44 (UTC+8) - dc.date.available 29-八月-2018 15:55:44 (UTC+8) - dc.date.issued (上傳時間) 29-八月-2018 15:55:44 (UTC+8) - dc.identifier (其他 識別碼) G1057550041 en_US dc.identifier.uri (URI) http://nccur.lib.nccu.edu.tw/handle/140.119/119756 - dc.description (描述) 碩士 zh_TW dc.description (描述) 國立政治大學 zh_TW dc.description (描述) 應用物理研究所 zh_TW dc.description (描述) 1057550041 zh_TW dc.description.abstract (摘要) 因應全世界能源問題，本論文研究重點在於收集生活中所有可能的廢熱來轉換成電能。並利用轉換能量的想法製作元件應用於目前市面上低功率電子產品。本論文之熱電元件大小尺寸長寬高分別為35mm x 35mm x 1mm並利用有400nm氧化層的矽基板作為基板，元件圖形運用黃光半導體製程建構128對的微陣列，藉由射頻濺鍍的方式製備N型(〖Cu〗_0.02 Bi_2 Te_2.7 Se_0.3)及P型(〖Bi〗_0.5 Sb_1.5 Te_3+0.33%Aerogel)的熱電材料且厚度達到10 μm。最後利用金作為上電極使128對的P型材料及N型材料串聯。本論文最大的突破是相較一般市售元件在熱傳導上降低將近一個數量級。並且期待在接近10K的溫差下能夠產生足以驅動電子元件功率。若能妥善利用該元件對於環境溫度變化極為敏銳且瞬間輸出電壓極大的優點，對於現代社會將是一大福音。本論文的熱電元件最津津樂道的是它代表著乾淨且永續的能源供應，熱電轉換的想法也可能是解決未來能源危機上的解決之道。 zh_TW dc.description.abstract (摘要) In response to the rising concern of global energy shortage, this thesis focus on how to transfer the waste heat from our daily life to electric power. We use this idea to create a device that can convert the energy to fit the need of most electrical devices which demand lower power in market. The diameter of thermoelectric device is 35 mm x 35 mm x1 mm in our work. We use silicon with 400 nm oxide layer as substrate. The pattern of 128 pairs of micro array thermoelectric device is constructed by semiconductor process. The N-type (〖Cu〗_0.02 Bi_2 Te_2.7 Se_0.3) and P-type(〖Bi〗_0.5 Sb_1.5 Te_3+0.33%Aerogel) film with thickness of 10 μm deposited by Radio Frequency Sputtering was prepared and the Au film was deposited as electrodes to make 128 pairs of P-N array. The breakthrough in this thesis is to reduce thermal conductance of the device one order less than that of commercial ones. This device is expected to output enough power to drive electronic devices as the temperature gradient near 10 K. If we can completely use the advantage of our device which is sensitive to environment temperature and give an electrical voltage output, then the idea will give society a valuable benefit. Thermoelectric device has tremendous potential of commercial value. The most value of this thesis is that thermoelectric device can present clean green energy, it may offer a solution to solve the global warming and energy shortage. en_US dc.description.tableofcontents 摘要 Abstract 致謝 圖片目錄 表格目錄 第一章、 緒論 1 第一節、 研究動機及目的 1 第二節、 淺談熱電元件 2 第三節、 各國元件發展 5 第四節、 熱電元件目標與未來性 6 第二章、 熱電元件物理原理 9 第一節、 熱電原理 9 第二節、 席貝克效應 (Seebeck effect) 9 第三節、 帕提爾效應(Peltier effect)： 10 第四節、 湯姆森效應(Thomson effect)： 11 第五節、 熱傳導率(Ƙ)： 12 第六節、 電導率 14 第七節、 Seebeck Coeffient： 16 第八節、 熱電優質係數(ZT)： 19 第三章、 熱電元件結構與製程 21 第一節、 熱電晶片基本結構 21 第二節、 第一代製程 22 第三節、 第二代製程 28 第四節、 第一代製程與第二代製程比較 45 第四章、 實驗儀器介紹與校正 48 第一節、 蒸鍍機 48 第二節、 球磨機及高溫熱壓機 48 4.2.1 球磨機 49 4.2.2 Spark Plasma Sintering (SPS) 50 第三節、 濺鍍機與鍍率 51 4.3.1 濺鍍機原理及介紹 51 4.3.2 濺鍍機鍍率 53 第四節、 ZEM 量測席貝克係數 56 4.4.1 ZEM-3 量測機台介紹 56 4.4.2 N-type 及 P-type 量測結果 58 第五節、 退火 61 第六節、 總結實驗問題 62 第五章、 量測結果 63 第一節、 量測儀器架設 63 第二節、 熱電元件結果與討論 66 第六章、 結論 71 參考文獻 zh_TW dc.source.uri (資料來源) http://thesis.lib.nccu.edu.tw/record/#G1057550041 en_US dc.subject (關鍵詞) 薄膜 zh_TW dc.subject (關鍵詞) 熱電元件 zh_TW dc.subject (關鍵詞) 射頻 zh_TW dc.subject (關鍵詞) 半導體製程 zh_TW dc.subject (關鍵詞) Sputtering en_US dc.subject (關鍵詞) Lithography en_US dc.title (題名) 利用半導體製程及射頻濺鍍製備128對碲化鉍-碲化銻薄膜熱電元件 zh_TW dc.title (題名) Fabrication of 128 Pairs Bi-Sb-Te Based Thin Film Thermoelectric Generator by Lithography and RF Sputtering Deposition en_US dc.type (資料類型) thesis en_US dc.relation.reference (參考文獻) [1] Wenhua Zhang (2016), A high power density micro-thermoelectric generator fabricated by an integrated bottom-up approach, journal of microelectromechanical system, vol. 25, no. 4, p.744-749 [2] Leonov V. Thermoelectric energy harvester on the heated human machine. J Micro Micro 2011;21:1–8. [3] Yancheng Wang,2018,Wearable thermoelectric generator to harvest body heat for powering a miniaturized accelerometer,Applied Energy,p.690-698 [4] Funahashi S, Nakamura T, Kageyama K, Ieki H. Monolithic oxide–metal composite thermoelectric generators for energy harvesting. J Appl Phys 2011;109:1–4. [5] Z.Xiao, 2018, The fabrication of nanoscale Bi2Te3/Sb2Te3 multilayer thin film-based thermoelectric power chips ,microelectronic engineering ,volume 197, pages 8-14 [6] Mizue Mizoshir , Yoshitaka Ito ,2017,Fabrication of thin-film thermoelectric generators with ball lenses for conversion of near-infrared solar light, The Japan Society of Applied Physics, 06GN06 [7] ShuangLiu, 2018,Micro-thermoelectric generators based on through glass pillars with high output voltage enabled by large temperature difference, Applied Energy Volume 225,Pages 600-610 [8]經濟部能源局，能源新政策，上網日期107年05月17日，檢自：https://www.moeaboe.gov.tw/ECW/populace/content/ContentDesc.aspx?menu_id=3165 [9] H.B. Gao ,2016,Development of stove-powered thermoelectric generators: A review ,Applied Thermal Engineering,96 297–310 [10] Hi-Z, Manufacturer of thermoelectric modules, 2015. Available from: www.hi- z.com. [11] Tellurex, Manufacturer of thermoelectric modules, 2015. Available from: www.tellurex.com. [12] Tecteg, Manufacturer of thermoelectric modules, 2015. Available from: www.tecteg.com. [13] Thermalforce, Manufacturer of thermoelectric modules, 2015. Available from: www.thermalforce.de. [14] Thermodynamic, Manufacturer of thermoelectric modules, 2015. Available from: www.thermonamic.com. [15] wireless-sensor, Retrieved: Sep. 2013 ,from:http://www.analog.com/media/cn/technical-documentation/technical-articles/Electronics_Application_201309_(LTC3109).pdf [16] 醫療監控，EETT-Taiwan，上網日期107年05月17日，檢自：https://www.eettaiwan.com/news/article/20171023NT01-Garment-Pattern-Power-Biosensor-Nets [17] Watch , http://www.coretechnology.com.tw/files/%E6%99%BA%E6%85%A7%E5%9E%8B%E6%89%8B%E9%8C%B6%E5%8A%9F%E8%80%97%E5%88%86%E6%9E%90%E5%85%A8%E8%A8%98%E9%8C%84.pdf [18]Seebeck, Retrieved June 8 2018, from: https://en.wikipedia.org/wiki/Thermoelectric_effect [19]Peltier, Retrieved 18 October 2013, from: https://en.wikipedia.org/wiki/Peltier [20]Thomson, Retrieved June 8 2018, from: https://en.wikipedia.org/wiki/Thermoelectric_effect#Thomson_effect [21]Neil W.Ashcroft，(1976)。Solid State Physics。Holt, Rinehart and Winston。 [22]Neil W.Ashcroft，(1976)。Solid State Physics。Holt, Rinehart and Winston。 [23]Seebeck Coefficient, Samuel B.Schaevitz, (2000).A MEMS thermoelectric generator, Publisher Location: Department of electrical engineering and computer science, pp.43 [24]Thermoelectric, Retrieved none,from: http://thermoelectrics.matsci.northwestern.edu/thermoelectrics/index.html [25]thermoelectric, Retrieve 2015, from: https://www.researchgate.net/profile/Corson_Cramer/publication/271137303/figure/fig6/AS:392142578044937@1470505484606/Curve-of-the-thermal-efficiency-of-a-thermoelectric-generator-as-a-function-of-the.ppm [26], Retrieved 20 Mar. 2014, from: http://cmnst.ncku.edu.tw/files/15-1023-159877,c17606-1.php?Lang=zh-tw [27] SPS, Retrieved 17 Oct. 2016, from: https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.201300409 [28] RF sputter, Retrieved 15 May 2013, from: http://www.kobelcokaken.co.jp/target/chinese/index.html [29] ZiyangWang,2009, Realization of a wearable miniaturized thermoelectric generator for human body applications Sensors and Actuators A: Physical Volume 156, Issue 1,Pages 95-102 zh_TW dc.identifier.doi (DOI) 10.6814/THE.NCCU.AP.003.2018.B04 -
