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題名 利用共面波導(CPW)電路耦合研究超導二硒化鈮(NbSe2)薄片之動能電感
Study of kinetic inductance of superconducting NbSe2 flakes through circuit CPW coupling作者 郭凱丞
Kuo, Kai-Chen貢獻者 柯忠廷
Ke, Chung-Ting
郭凱丞
Kuo, Kai-Chen關鍵詞 超導
共面波導
螺旋形共振器
品質因子
二硒化鈮
動能電感
superconductor
coplanar waveguide(CPW)
spiral resonator
quality factor(Q-factor)
niobium diselenide(NbSe2)
kinetic inductance日期 2026 上傳時間 2-Mar-2026 12:35:48 (UTC+8) 摘要 在超導量子位元晶片中使用共面波導共振器區分各個量子位元，共振器另一端與微波傳輸線耦合用來讀取多個量子位元的訊息。共振器中的品質因子(quality factor)決定共振頻率波谷的寬度，寬度越窄品質因子越高，更好分辨共振頻率與相位的變化。 本文研究螺旋形超導共振器與共面波導共振器嵌入二維材料的特性。螺旋型共振器多應用於微波動能電感偵測器(MKIDs)，其提供高達$10^7$的品質因子，具有作為傳輸線與量子位元連接的潛力。共面波導可用作量測二維材料的平台。將二維材料嵌入共振器與接地面做銜接，改變共振器的共振波長並可量測二維材料的動能電感特性。 本實驗製作的螺旋形共振器品質因子不符預期，但仍表現出在低輸入功率下穩定的品質因子。採用鋁製作共面波導並銜接二硒化鈮薄片，在不同溫度下量測到動能電感造成的共振頻率偏移與品質因子的變化。
In superconducting qubit chips, coplanar waveguide (CPW) resonators are used to distinguish individual qubits. The other end of each resonator is coupled to a microwave feedline for multiplexed readout of multiple qubits. The quality factor of a resonator determines the linewidth of the resonance dip in frequency spectrum; a narrower linewidth corresponds to a higher quality factor, enabling better discrimination of changes in resonance frequency and phase. This work investigates the properties of spiral superconducting resonators and coplanar waveguide resonators integrated with two-dimensional materials. Spiral resonators are commonly used in microwave kinetic inductance detectors (MKIDs) and can exhibit quality factors as high as $10^7$, demonstrating their potential for connecting feedline and qubits. Coplanar waveguides can also serve as a platform for probing two-dimensional materials. By embedding a two-dimensional material into a resonator and electrically connecting it to the ground plane, the resonant wavelength of the resonator is modified, allowing the kinetic inductance of the two-dimensional material to be measured. Although the quality factors of the spiral resonators fabricated in this experiment did not meet expectations, they still exhibited stable quality factors at low input powers. In addition, coplanar waveguides fabricated from aluminum and connected to niobium diselenide (NbSe2) flakes were measured at different temperatures, revealing resonance frequency shifts induced by kinetic inductance and corresponding changes in the quality factor.參考文獻 [1] Yusuke Tominaga, Shotaro Shirai, Yuji Hishida, Hirotaka Terai, and Atsushi Noguchi. Enhancing intrinsic quality factors approaching 10 million in superconducting planar resonators via spiral geometry, 2025. [2] Mary Kreidel, Xuanjing Chu, Jesse Balgley, Abhinandan Antony, Nishchhal Verma, Julian Ingham, Leonardo Ranzani, Raquel Queiroz, Robert M. Westervelt, James Hone, and Kin Chung Fong. Measuring kinetic inductance and superfluid stiffness of two-dimensional superconductors using high-quality transmission-line resonators, 2024. [3] Sameia Zaman, Joel Î j. Wang, Thomas Werkmeister, Miuko Tanaka, Thao Dinh, Max Hays, Daniel Rodan-Legrain, Aranya Goswami, Réouven Assouly, Ahmet Kemal Demir, David K. Kim, Bethany M. Niedzielski, Kyle Serniak, Mollie E. Schwartz, Kenji Watanabe, Takashi Taniguchi, Philip Kim, Riccardo Comin, Jeffrey A. Grover, Terry P. Orlando, Pablo Jarillo-Herrero, and William D. Oliver. Kinetic inductance of few-layer nbse2 in the two-dimensional limit, 2025. [4] 郭柏汝. 二維二硒化鈮之約瑟夫森效應及超導量子位元的應用, 2021. [5] Simon Ramo, John R. Whinnery, and Theodore Van Duzer. Fields and waves in communication electronics. 1966. [6] David M. Pozar. Microwave engineering. Wiley, Hoboken, NJ, 4th ed edition, 2012. OCLC: ocn714728044. [7] K Hayashi, A Saito, Y Ogawa, M Murata, T Sawada, K Nakajima, H Yamada, S Ariyoshi, T Taino, H Tanoue, C Otani, and S Ohshima. Design and fabrication of microwave kinetic inductance detectors using nbn symmetric spiral resonator array. Journal of Physics: Conference Series, 507(4):042015, may 2014. [8] U. Fano. Effects of configuration interaction on intensities and phase shifts. Phys. Rev., 124:1866–1878, Dec 1961. [9] S. M. Silverman. Theorem for generalized oscillator strengths. Phys. Rev., 111:1114–1115, Aug 1958. [10] D. Rieger, S. Günzler, M. Spiecker, A. Nambisan, W. Wernsdorfer, and I.M. Pop. Fano interference in microwave resonator measurements. Physical Review Applied, 20(1), July 2023. [11] J. Bardeen, L. N. Cooper, and J. R. Schrieffer. Microscopic theory of superconductivity. Phys. Rev., 106:162–164, Apr 1957. [12] R. Meservey and P. M. Tedrow. Measurements of the kinetic inductance of superconducting linear structures. Journal of Applied Physics, 40(5):2028–2034, 04 1969. [13] Ansys. Ansys hfss technical notes. Ansys online technical notes, Ansys, part of Synopsys, 2024. [14] Mikko Tuokkola, Yoshiki Sunada, Heidi Kivijärvi, Jonatan Albanese, Leif Grönberg, Jukka-Pekka Kaikkonen, Visa Vesterinen, Joonas Govenius, and Mikko Möttönen. Methods to achieve near-millisecond energy relaxation and dephasing times for a superconducting transmon qubit, 2025. [15] S. Probst, F. B. Song, P. A. Bushev, A. V. Ustinov, and M. Weides. Efficient and robust analysis of complex scattering data under noise in microwave resonators. Review of Scientific Instruments, 86(2):024706, 02 2015. [16] N. Chernov and C. Lesort. Least squares fitting of circles. Journal of Mathematical Imaging and Vision, 23(3):239–252, Nov 2005. [17] Jonathan Burnett, Andreas Bengtsson, David Niepce, and Jonas Bylander. Noise and loss of superconducting aluminium resonators at single photon energies. Journal of Physics: Conference Series, 969:012131, March 2018. [18] A. Bruno, G. de Lange, S. Asaad, K. L. van der Enden, N. K. Langford, and L. Di-Carlo. Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates. Applied Physics Letters, 106(18), May 2015. [19] Anthony J Annunziata, Daniel F Santavicca, Luigi Frunzio, Gianluigi Catelani, Michael J Rooks, Aviad Frydman, and Daniel E Prober. Tunable superconducting nanoinductors. Nanotechnology, 21(44):445202, October 2010. [20] A. Megrant, C. Neill, R. Barends, B. Chiaro, Yu Chen, L. Feigl, J. Kelly, Erik Lucero, Matteo Mariantoni, P. J. J. O’Malley, D. Sank, A. Vainsencher, J. Wenner, T. C. White, Y. Yin, J. Zhao, C. J. Palmstrøm, John M. Martinis, and A. N. Cleland. Planar superconducting resonators with internal quality factors above one million. Applied Physics Letters, 100(11), March 2012. 描述 碩士
國立政治大學
應用物理研究所
112755015資料來源 http://thesis.lib.nccu.edu.tw/record/#G0112755015 資料類型 thesis dc.contributor.advisor 柯忠廷 zh_TW dc.contributor.advisor Ke, Chung-Ting en_US dc.contributor.author (Authors) 郭凱丞 zh_TW dc.contributor.author (Authors) Kuo, Kai-Chen en_US dc.creator (作者) 郭凱丞 zh_TW dc.creator (作者) Kuo, Kai-Chen en_US dc.date (日期) 2026 en_US dc.date.accessioned 2-Mar-2026 12:35:48 (UTC+8) - dc.date.available 2-Mar-2026 12:35:48 (UTC+8) - dc.date.issued (上傳時間) 2-Mar-2026 12:35:48 (UTC+8) - dc.identifier (Other Identifiers) G0112755015 en_US dc.identifier.uri (URI) https://nccur.lib.nccu.edu.tw/handle/140.119/161879 - dc.description (描述) 碩士 zh_TW dc.description (描述) 國立政治大學 zh_TW dc.description (描述) 應用物理研究所 zh_TW dc.description (描述) 112755015 zh_TW dc.description.abstract (摘要) 在超導量子位元晶片中使用共面波導共振器區分各個量子位元，共振器另一端與微波傳輸線耦合用來讀取多個量子位元的訊息。共振器中的品質因子(quality factor)決定共振頻率波谷的寬度，寬度越窄品質因子越高，更好分辨共振頻率與相位的變化。 本文研究螺旋形超導共振器與共面波導共振器嵌入二維材料的特性。螺旋型共振器多應用於微波動能電感偵測器(MKIDs)，其提供高達$10^7$的品質因子，具有作為傳輸線與量子位元連接的潛力。共面波導可用作量測二維材料的平台。將二維材料嵌入共振器與接地面做銜接，改變共振器的共振波長並可量測二維材料的動能電感特性。 本實驗製作的螺旋形共振器品質因子不符預期，但仍表現出在低輸入功率下穩定的品質因子。採用鋁製作共面波導並銜接二硒化鈮薄片，在不同溫度下量測到動能電感造成的共振頻率偏移與品質因子的變化。 zh_TW dc.description.abstract (摘要) In superconducting qubit chips, coplanar waveguide (CPW) resonators are used to distinguish individual qubits. The other end of each resonator is coupled to a microwave feedline for multiplexed readout of multiple qubits. The quality factor of a resonator determines the linewidth of the resonance dip in frequency spectrum; a narrower linewidth corresponds to a higher quality factor, enabling better discrimination of changes in resonance frequency and phase. This work investigates the properties of spiral superconducting resonators and coplanar waveguide resonators integrated with two-dimensional materials. Spiral resonators are commonly used in microwave kinetic inductance detectors (MKIDs) and can exhibit quality factors as high as $10^7$, demonstrating their potential for connecting feedline and qubits. Coplanar waveguides can also serve as a platform for probing two-dimensional materials. By embedding a two-dimensional material into a resonator and electrically connecting it to the ground plane, the resonant wavelength of the resonator is modified, allowing the kinetic inductance of the two-dimensional material to be measured. Although the quality factors of the spiral resonators fabricated in this experiment did not meet expectations, they still exhibited stable quality factors at low input powers. In addition, coplanar waveguides fabricated from aluminum and connected to niobium diselenide (NbSe2) flakes were measured at different temperatures, revealing resonance frequency shifts induced by kinetic inductance and corresponding changes in the quality factor. en_US dc.description.tableofcontents 誌謝...i 摘要...ii Abstract...iii 目錄...v 圖目錄...viii 表目錄...x 第一章前言...1 1.1 研究目的...1 第二章實驗理論背景...2 2.1 超導量子裝置...2 2.1.1 鋁(Al)...3 2.1.2 二硒化鈮(NbSe2)...3 2.2 微波超導共振器...4 2.2.1 傳輸線型共振器...5 2.2.2 二分之一波長共振器(𝜆/2 resonator)...6 2.2.3 四分之一波長共振器(𝜆/4 resonator)...9 2.2.4 螺旋形共振器...10 2.3 法諾共振(Fano resonance)...12 2.4 超導BCS 理論(BCS theory)...13 2.5 動能電感(kinectic inductance)...14 第三章樣品製程...15 3.1 樣品設計與模擬...15 3.1.1 傳輸線與周圍結構...15 3.1.2 共振器模擬...16 3.2 樣品製作流程...16 3.2.1 螺旋形共振器製作流程...16 3.2.2 Aalto 浮空量子位元共振器補償接地(Aalto floating qubit resonator ground patch)...18 3.2.3 簡化傳輸線與共面波導共振器嵌入接地...21 3.3 儀器與技術簡介...21 3.3.1 電子束微影...21 3.3.2 濺鍍...23 3.3.3 蒸鍍...25 3.3.4 剝離(Lift-off)...26 3.3.5 蝕刻...27 3.3.6 二維材料轉移...28 3.3.7 離子束研磨(ion milling)...30 第四章實驗架設與量測方法...32 4.1 實驗架設...32 4.1.1 樣品載台...32 4.1.2 低溫系統...34 4.1.3 微波訊號迴路...36 4.2 量測方法...37 第五章實驗數據分析與討論...39 5.1 共振器特性分析...39 5.1.1 品質因數(Q 值)...39 5.1.2 能量相關性(power dependent)...41 5.1.3 共振器內光子數(photon number)...41 5.1.4 溫度相關性...42 5.2 螺旋型共振器分析...44 5.3 Aalto 共振器分析...46 5.4 二硒化鈮與鋁動能電感分析...52 第六章結論...60 6.1 結論...60 6.2 未來研究...61 參考文獻...62 zh_TW dc.format.extent 20871509 bytes - dc.format.mimetype application/pdf - dc.source.uri (資料來源) http://thesis.lib.nccu.edu.tw/record/#G0112755015 en_US dc.subject (關鍵詞) 超導 zh_TW dc.subject (關鍵詞) 共面波導 zh_TW dc.subject (關鍵詞) 螺旋形共振器 zh_TW dc.subject (關鍵詞) 品質因子 zh_TW dc.subject (關鍵詞) 二硒化鈮 zh_TW dc.subject (關鍵詞) 動能電感 zh_TW dc.subject (關鍵詞) superconductor en_US dc.subject (關鍵詞) coplanar waveguide(CPW) en_US dc.subject (關鍵詞) spiral resonator en_US dc.subject (關鍵詞) quality factor(Q-factor) en_US dc.subject (關鍵詞) niobium diselenide(NbSe2) en_US dc.subject (關鍵詞) kinetic inductance en_US dc.title (題名) 利用共面波導(CPW)電路耦合研究超導二硒化鈮(NbSe2)薄片之動能電感 zh_TW dc.title (題名) Study of kinetic inductance of superconducting NbSe2 flakes through circuit CPW coupling en_US dc.type (資料類型) thesis en_US dc.relation.reference (參考文獻) [1] Yusuke Tominaga, Shotaro Shirai, Yuji Hishida, Hirotaka Terai, and Atsushi Noguchi. Enhancing intrinsic quality factors approaching 10 million in superconducting planar resonators via spiral geometry, 2025. [2] Mary Kreidel, Xuanjing Chu, Jesse Balgley, Abhinandan Antony, Nishchhal Verma, Julian Ingham, Leonardo Ranzani, Raquel Queiroz, Robert M. Westervelt, James Hone, and Kin Chung Fong. Measuring kinetic inductance and superfluid stiffness of two-dimensional superconductors using high-quality transmission-line resonators, 2024. [3] Sameia Zaman, Joel Î j. Wang, Thomas Werkmeister, Miuko Tanaka, Thao Dinh, Max Hays, Daniel Rodan-Legrain, Aranya Goswami, Réouven Assouly, Ahmet Kemal Demir, David K. Kim, Bethany M. Niedzielski, Kyle Serniak, Mollie E. Schwartz, Kenji Watanabe, Takashi Taniguchi, Philip Kim, Riccardo Comin, Jeffrey A. Grover, Terry P. Orlando, Pablo Jarillo-Herrero, and William D. Oliver. Kinetic inductance of few-layer nbse2 in the two-dimensional limit, 2025. [4] 郭柏汝. 二維二硒化鈮之約瑟夫森效應及超導量子位元的應用, 2021. [5] Simon Ramo, John R. Whinnery, and Theodore Van Duzer. Fields and waves in communication electronics. 1966. [6] David M. Pozar. Microwave engineering. Wiley, Hoboken, NJ, 4th ed edition, 2012. OCLC: ocn714728044. [7] K Hayashi, A Saito, Y Ogawa, M Murata, T Sawada, K Nakajima, H Yamada, S Ariyoshi, T Taino, H Tanoue, C Otani, and S Ohshima. Design and fabrication of microwave kinetic inductance detectors using nbn symmetric spiral resonator array. Journal of Physics: Conference Series, 507(4):042015, may 2014. [8] U. Fano. Effects of configuration interaction on intensities and phase shifts. Phys. Rev., 124:1866–1878, Dec 1961. [9] S. M. Silverman. Theorem for generalized oscillator strengths. Phys. Rev., 111:1114–1115, Aug 1958. [10] D. Rieger, S. Günzler, M. Spiecker, A. Nambisan, W. Wernsdorfer, and I.M. Pop. Fano interference in microwave resonator measurements. Physical Review Applied, 20(1), July 2023. [11] J. Bardeen, L. N. Cooper, and J. R. Schrieffer. Microscopic theory of superconductivity. Phys. Rev., 106:162–164, Apr 1957. [12] R. Meservey and P. M. Tedrow. Measurements of the kinetic inductance of superconducting linear structures. Journal of Applied Physics, 40(5):2028–2034, 04 1969. [13] Ansys. Ansys hfss technical notes. Ansys online technical notes, Ansys, part of Synopsys, 2024. [14] Mikko Tuokkola, Yoshiki Sunada, Heidi Kivijärvi, Jonatan Albanese, Leif Grönberg, Jukka-Pekka Kaikkonen, Visa Vesterinen, Joonas Govenius, and Mikko Möttönen. Methods to achieve near-millisecond energy relaxation and dephasing times for a superconducting transmon qubit, 2025. [15] S. Probst, F. B. Song, P. A. Bushev, A. V. Ustinov, and M. Weides. Efficient and robust analysis of complex scattering data under noise in microwave resonators. Review of Scientific Instruments, 86(2):024706, 02 2015. [16] N. Chernov and C. Lesort. Least squares fitting of circles. Journal of Mathematical Imaging and Vision, 23(3):239–252, Nov 2005. [17] Jonathan Burnett, Andreas Bengtsson, David Niepce, and Jonas Bylander. Noise and loss of superconducting aluminium resonators at single photon energies. Journal of Physics: Conference Series, 969:012131, March 2018. [18] A. Bruno, G. de Lange, S. Asaad, K. L. van der Enden, N. K. Langford, and L. Di-Carlo. Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates. Applied Physics Letters, 106(18), May 2015. [19] Anthony J Annunziata, Daniel F Santavicca, Luigi Frunzio, Gianluigi Catelani, Michael J Rooks, Aviad Frydman, and Daniel E Prober. Tunable superconducting nanoinductors. Nanotechnology, 21(44):445202, October 2010. [20] A. Megrant, C. Neill, R. Barends, B. Chiaro, Yu Chen, L. Feigl, J. Kelly, Erik Lucero, Matteo Mariantoni, P. J. J. O’Malley, D. Sank, A. Vainsencher, J. Wenner, T. C. White, Y. Yin, J. Zhao, C. J. Palmstrøm, John M. Martinis, and A. N. Cleland. Planar superconducting resonators with internal quality factors above one million. Applied Physics Letters, 100(11), March 2012. zh_TW
